A surface-acoustic-wave gyro sensor

被引：63
|
作者：
Kurosawa, M
Fukuda, Y
Takasaki, M
Higuchi, T
机构：
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Bunkyo Ku, Tokyo 113, Japan
[2] Kanagawa Acad Sci & Technol, Higuchi Ultimate Mechatr Project, Takatsu Ku, Kawasaki, Kanagawa 213, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期
关键词：
gyroscopes; vibratory gyroscopes; surface acoustic waves; piezoelectric transducers;
D O I：
10.1016/S0924-4247(97)01713-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper explains two novel methods to detect angular velocity by using a surface-acoustic-wave (SAW) device. In both methods, Coriolis forces, which act on the particles vibrating in the standing wave of a SAW, are applied. A novel gyro sensor is planned based on one of the two methods. For accurate fabrication, the dimensions of the electrodes are designed by using equivalent-circuit models. A SAW gyro sensor using a Rayleigh wave that propagated on a 128 degrees Y-cut LiNbO3 3 inch wafer with an operating frequency of 15 MHz has been designed and fabricated on trial. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：33 / 39
页数：7
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