共 50 条
- [1] Micro-pressure sensor dynamic performance analysis [J]. SENSOR REVIEW, 2014, 34 (04) : 367 - 373
- [2] A Micromachined Resonant Micro-Pressure Sensor [J]. IEEE SENSORS JOURNAL, 2021, 21 (18) : 19789 - 19796
- [8] A SURFACE ACOUSTIC WAVE PRESSURE SENSOR BASED ON MICRO-CORONA-DISCHARGING EFFECT [J]. 2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), 2021, : 768 - 770