Wireless love-wave chemical sensor on 41° YX LiNbO3

被引：2
|
作者：
Wang, W. [1 ]
Kim, T. [1 ]
Lee, K. [1 ]
Yang, S. [1 ]
机构：
[1] Ajou Univ, Div Elect Engn, Suwon 443749, South Korea
来源：
ELECTRONICS LETTERS | 2007年 / 43卷 / 22期
关键词：
D O I：
10.1049/el:20072067
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design and performance of a novel wireless Love-wave CO2 sensor using a poly(methylmethacrylate) guiding layer on 41 degrees YX LiNbO3 piezoelectric substrate are described. Teflon AF2400 sensitive film provides large CO2 solubility, permeability and selectivity. A theoretical model is performed to describe wave propagation in Love-wave devices with large piezoelectricity substrate and to allow designing an optimised structure. A coupling of modes model is used to determine optimal design parameters. The gas response properties of the fabricated sensor as the linearity and sensitivity are studied, and also a comparison to surface acoustic wave results, are discussed.
引用
收藏
页码：1239 / 1241
页数：3
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