Graphene/LiNbO3 surface acoustic wave device based relative humidity sensor

被引：18
|
作者：
Guo, Y. J. [1 ,2 ]
Zhang, J. [2 ,3 ]
Zhao, C. [2 ]
Hu, P. A. [3 ]
Zu, X. T. [1 ]
Fu, Y. Q. [2 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
[2] Univ West Scotland, Scottish Univ Phys Alliance SUPA, Thin Film Ctr, Paisley PA1 2BE, Renfrew, Scotland
[3] Harbin Inst Technol, Key Lab Microsyst & Microstruct, Harbin 150080, Peoples R China
来源：
OPTIK | 2014年 / 125卷 / 19期
基金：
中国国家自然科学基金;
关键词：
Graphene; LiNbO3 SAW device; Relative humidity; TCF; FILM;
D O I：
10.1016/j.ijleo.2014.06.090
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This study described relative humidity (RH) sensing using a graphene/128 degrees YX LiNbO3 surface acoustic wave (SAW) device. The resonant frequency of the device decreased in a two-stage manner as the RH increased. For a low RH range (RH < 50%), a frequency downshift of 1.38 kHz per 1% RH change was observed. This was attributed to mass loading of the SAW propagation surface due to the adsorption of water molecules by the graphene surface. For a high RH range (RH >50%), a frequency downshift of 2.6 kHz per 1% RH change was obtained, which was due to the change in elastic grapheme properties. The mass loading effect of the water layer was less effective at high temperature, resulting in a lower temperature coefficient of resonant frequency (TCF). (C) 2014 Elsevier GmbH. All rights reserved.
引用
收藏
页码：5800 / 5802
页数：3
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