Laser-induced damage thresholds and mechanism of silica glass induced by ultra-short soft x-ray laser pulse irradiation

被引:11
|
作者
Mikami, Katsuhiro [1 ]
Ishino, Masahiko [2 ]
Dinh, Thanh-Hung [2 ]
Motokoshi, Shinji [3 ]
Hasegawa, Noboru [2 ]
Kon, Akira [4 ,5 ]
Inubushi, Yuichi [4 ,5 ]
Owada, Shigeki [4 ,5 ]
Kinoshita, Hiroo [6 ]
Nishikino, Masaharu [2 ]
机构
[1] Kindai Univ, Fac Biol Oriented Sci & Technol, 930 Nishi Mitani, Wakayama 6496493, Japan
[2] Natl Inst Quantum & Radiol Sci & Technol, Kansai Photon Sci Inst, 8-1-7 Umemi Dai, Kizugawa, Kyoto 6190215, Japan
[3] Inst Laser Technol, Nishi Ku, 1-8-4 Utsubo Honmachi, Osaka 5500004, Japan
[4] Japan Synchrotron Radiat Res Inst JASRI, 1-1-1 Kouto, Sayo, Hyogo 6795198, Japan
[5] RIKEN SPring 8 Ctr, 1-1-1 Kouto, Sayo, Hyogo 6795148, Japan
[6] Univ Hyogo, 3-1-2 Kouto, Kamigori, Hyogo 6781205, Japan
基金
日本学术振兴会;
关键词
TEMPERATURE-DEPENDENCE; DIELECTRICS; ABLATION; NANOSECOND; SIZE; NM;
D O I
10.1364/OL.389288
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Laser-induced damage thresholds (LIDTs) of silica glasses obtained by the femtosecond soft x-ray free-electron laser (SXFEL, 13.5 nm, 70 fs) and the picosecond soft x-ray laser (SXRL, 13.9 nm, 7 ps) are evaluated. The volume of the hydroxyl group in the silica glasses influenced its LIDTs. The LIDTs obtained in this research by the femtosecond. SXFEL and the picosecond SXRL were nearly identical, but were different from that by the nanosecond soft x-ray pulse. The photoionization processes of silica glass in context of the laser-induced damage mechanism (LIDM) are also discussed. In the ultra-short soft x-ray pulse irradiation regime, the LIDM can be speculated to include the spallation process with a scission of bondings. (C) 2020 Optical Society of America
引用
收藏
页码:2435 / 2438
页数:4
相关论文
共 50 条
  • [1] Laser-Induced Damage on Silica Glasses by Irradiation of Soft X-Ray Laser Pulse
    Mikami, K.
    Ishino, M.
    Dinh, T. -H.
    Yamamoto, Y.
    Hasegawa, N.
    Nishikino, M.
    Kawachi, T.
    Motokoshi, S.
    Jitsuno, T.
    [J]. X-RAY LASERS 2016, 2018, 202 : 333 - 337
  • [2] Threshold of ultra-short pulse laser-induced damage in dielectric materials
    Jia, TQ
    Li, RX
    Liu, Z
    Chen, H
    Xu, ZZ
    [J]. APPLIED SURFACE SCIENCE, 2002, 189 (1-2) : 78 - 83
  • [3] Ablation of Silica Glass Induced by Laser Plasma Soft X-Ray Irradiation
    Makimura, Tetsuya
    Fujimori, Takashige
    Torii, Shuichi
    Niino, Hiroyuki
    Murakami, Kouichi
    [J]. ELECTRONICS AND COMMUNICATIONS IN JAPAN, 2011, 94 (09) : 30 - 35
  • [4] Temperature Dependence of Laser-Induced Damage Thresholds by Short Pulse Laser
    Mikami, Katsuhiro
    Motokoshi, Shinji
    Somekawa, Toshihiro
    Jitsuno, Takahisa
    Fujita, Masayuki
    Tanaka, Kazuo A.
    [J]. LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2012, 2012, 8530
  • [5] Ablation process of silica glass induced by laser plasma soft X-ray irradiation
    Torii, Shuichi
    Fujimori, Takashige
    Makimura, Tetsuya
    Niino, Hiroyuki
    Murakami, Kouichi
    [J]. APPLIED SURFACE SCIENCE, 2009, 255 (24) : 9840 - 9842
  • [6] Laser-induced front side etching of fused silica with short and ultra-short laser pulses
    Lorenz, P.
    Ehrhardt, M.
    Zimmer, K.
    [J]. LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XVII, 2012, 8243
  • [7] Ultra-short pulsed laser-induced damage in inorganic silicon materials
    Wuhan National Laboratory for Optoelectronics, School of Optoelectronics Science and Engineering, Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
    [J]. Zhongguo Jiguang, 2007, 7 (1009-1013):
  • [8] Study of damage in fused silica induced by ultra-short IR laser pulses
    Sudrie, L
    Franco, M
    Prade, B
    Mysyrowicz, A
    [J]. OPTICS COMMUNICATIONS, 2001, 191 (3-6) : 333 - 339
  • [9] Ultra-short laser-induced high aspect ratio densification in porous glass
    Itina, Tatiana
    Zakoldaev, Roman
    Sergeev, Maxim M.
    Ma, Hongfeng
    Kudryashov, Sergey
    Medvedev, Oleg S.
    Veiko, Vadim P.
    [J]. OPTICAL MATERIALS EXPRESS, 2019, 9 (11): : 4379 - 4389
  • [10] A numerical study on ultra-short pulse laser-induced damage on dielectrics using the Fokker-Planck equation
    Oh, YM
    Lee, SH
    Park, S
    Lee, JS
    [J]. INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2006, 49 (7-8) : 1493 - 1500