Micro-cantilever design and modeling framework for quantitative multi-frequency AFM

Recently several multi-frequency imaging techniques have been proposed that have opened up a multitude of information channels to probe surface properties in atomic force microscopy (AFM). However, the dynamics involved are significantly more complicated than in the traditional AFM modes, and hence quantitative multi-frequency AFM (MF-AFM) remains a key challenge. In this paper, we introduce custom-made micro-cantilevers with integrated actuators and a systems-theoretic modeling framework for MF-AFM, which together provide powerful experimental and theoretical tools for quantitative measurement of tip-sample interaction forces and sample properties.