Micro-cantilever design and modeling framework for quantitative multi-frequency AFM

被引：0

作者：

Shamsudhin, Naveen ^{[1
]}

Rothuizen, Hugo ^{[2
]}

Despont, Michel ^{[2
]}

Lygeros, John ^{[3
]}

Sebastian, Abu ^{[2
]}

机构：

[1] Swiss Fed Inst Technol, Inst Robot & Intelligent Syst, CH-8092 Zurich, Switzerland

[2] IBM Res, CH-8803 Ruschlikon, Switzerland

[3] ETH, Automat Control Lab, CH-8092 Zurich, Switzerland

来源：

2012 12TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2012年

关键词：

atomic force microscopy; multi-frequency AFM; micro-cantilevers; systems theory; ATOMIC-FORCE MICROSCOPY; NOISE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recently several multi-frequency imaging techniques have been proposed that have opened up a multitude of information channels to probe surface properties in atomic force microscopy (AFM). However, the dynamics involved are significantly more complicated than in the traditional AFM modes, and hence quantitative multi-frequency AFM (MF-AFM) remains a key challenge. In this paper, we introduce custom-made micro-cantilevers with integrated actuators and a systems-theoretic modeling framework for MF-AFM, which together provide powerful experimental and theoretical tools for quantitative measurement of tip-sample interaction forces and sample properties.

引用

页数：5

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