Spectroscopic ellipsometry: Application to complex optoelectronic layer systems

被引：0
|
作者：
Rheinlander, B [1 ]
Schubert, M [1 ]
Schmidt, H [1 ]
机构：
[1] Univ Leipzig, Fac Phys & Geosci, Dept Semicond, D-04103 Leipzig, Germany
来源：
HETEROSTRUCTURE EPITAXY AND DEVICES: HEAD '97 | 1998年 / 48卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：151 / 154
页数：4
相关论文
共 50 条
  • [21] Characterization of interface layer of silicon on sapphire using spectroscopic ellipsometry
    Jayatissa, Ahalapitiya Hewage
    Yamaguchi, Tomuo
    Sawada, Kazuaki
    Aoyama, Mitsuru
    Sato, Fumio
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (12 A): : 7152 - 7155
  • [22] Generalized ellipsometry and complex optical systems
    Univ of Leipzig, Leipzig, Germany
    Thin Solid Films, 1998, 313-314 (1-2): : 323 - 332
  • [23] Generalized ellipsometry and complex optical systems
    Schubert, M
    THIN SOLID FILMS, 1998, 313 : 323 - 332
  • [24] Application of spectroscopic ellipsometry to characterization of optical thin films
    Woollam, JA
    Bungay, C
    Yan, L
    Thompson, DW
    Hilfiker, J
    LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2002 AND 7TH INTERNATIONAL WORKSHOP ON LASER BEAM AND OPTICS CHARACTERIZATION, 2003, 4932 : 393 - 404
  • [25] APPLICATION OF SPECTROSCOPIC ELLIPSOMETRY TO THE ADSORPTION OF OXYGEN ON SILVER (110)
    KOTZ, R
    HAYDEN, BE
    SCHWEIZER, E
    BRADSHAW, AM
    SURFACE SCIENCE, 1982, 117 (1-3) : 331 - 341
  • [26] Application of spectroscopic ellipsometry for investigations of compaction and decompaction state in Si-SiO2 systems
    Rzodkiewicz, W.
    Panas, A.
    7TH INTERNATIONAL CONFERENCE ON MODERN PRACTICE IN STRESS AND VIBRATION ANALYSIS, 2009, 181
  • [27] Spectroscopic Ellipsometry
    Sakurai, Masayuki
    JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 2012, 57 (07) : 455 - 460
  • [28] Structural and optoelectronic properties of a-Si:H: A new analysis based on spectroscopic ellipsometry
    He, Jian
    Guo, Anran
    Li, Wei
    Mu, Jiliang
    Hou, Xiaojuan
    Xue, Chenyang
    Chou, Xiujian
    VACUUM, 2017, 146 : 409 - 421
  • [29] Characterization of complex inter-layer dielectric stack by spectroscopic ellipsometry: A simple method to reduce parameters correlations
    Likhachev, D. V.
    THIN SOLID FILMS, 2014, 550 : 305 - 311
  • [30] SPECTROSCOPIC ELLIPSOMETRY
    Pascu, Rovena
    Dinescu, Maria
    ROMANIAN REPORTS IN PHYSICS, 2012, 64 (01) : 135 - 142
12345