Advanced mechanical design and control methods for atomic force microscopy in real-time

被引：0
|
作者：
Schitter, Georg [1 ]
机构：
[1] Delft Univ Technol, Delft Ctr Syst & Control DCSC, NL-2628 CD Delft, Netherlands
来源：
2007 AMERICAN CONTROL CONFERENCE, VOLS 1-13 | 2007年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This article reviews mechanical design and control of atomic force microscopes (AFM) with a special emphasis on high-speed imaging. The mechanical design and the control system determine the achievable imaging speed of the AFM. To enable AFM imaging at video-rates, imaging speed - and thus system performance - has to be increased by at least two orders of magnitude relative to today's commercial AFMs. Methods and results presented in this paper demonstrate how this can be achieved.
引用
收藏
页码：681 / 686
页数：6
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