Advanced mechanical design and control methods for atomic force microscopy in real-time

被引:0
|
作者
Schitter, Georg [1 ]
机构
[1] Delft Univ Technol, Delft Ctr Syst & Control DCSC, NL-2628 CD Delft, Netherlands
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中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This article reviews mechanical design and control of atomic force microscopes (AFM) with a special emphasis on high-speed imaging. The mechanical design and the control system determine the achievable imaging speed of the AFM. To enable AFM imaging at video-rates, imaging speed - and thus system performance - has to be increased by at least two orders of magnitude relative to today's commercial AFMs. Methods and results presented in this paper demonstrate how this can be achieved.
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页码:681 / 686
页数:6
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