Bandwidth-tunable Filter Consisting of SAW Resonators and BaSrTiO3 Varactors Directly Fabricated on a LiTaO3 Wafer

被引：7

作者：

Kimura, Tetsuya ^{[1
]}

Kobayashi, Hideaki ^{[1
]}

Kishimoto, Yutaka ^{[1
]}

Kato, Hideyuki ^{[1
]}

Inaba, Masahiro

Hashimoto, Ken-ya ^{[2
]}

Matsumura, Takeshi ^{[3
]}

Hirano, Hideki ^{[4
]}

Kadota, Michio ^{[4
]}

Esashi, Masayoshi ^{[4
]}

Tanaka, Shuji ^{[4
]}

机构：

[1] Murata Mfg Co Ltd, Kyoto, Japan

[2] Chiba Univ, Grad Sch Engn, Chiba, Japan

[3] Natl Inst Informat & Commun Technol, Kanagawa, Japan

[4] Tohoku Univ, Microsyst Integrat Ctr, Sendai, Miyagi 980, Japan

来源：

2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2014年

关键词：

tunable filter; BaSrTiO3; LiTaO3;

D O I：

10.1109/ULTSYM.2014.0195

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600 degrees C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42 degrees YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42 degrees YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

引用

页码：795 / 798

页数：4

共 25 条

[21] High Performance SAW Resonators Using LiTaO3/SiO2/4H-SiC Multilayer Substrate
Li, Ming
Xia, Xin
Li, Kunpeng
Wu, Shuxian
Zou, Jie
Chen, Kunfeng
Tang, Gongbin
IEEE ELECTRON DEVICE LETTERS, 2022, 43 (10) : 1772 - 1775
[22] LiTaO3/Silicon Composite Wafers for the Fabrication of Low Loss Low TCF High Coupling Resonators for Filter Applications
Courjon, E.
Ballandras, S.
Daniau, W.
Baron, T.
Moulet, J. B.
Signamarcheix, T.
2015 JOINT IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC, INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES AND PIEZOELECTRIC FORCE MICROSCOPY WORKSHOP (ISAF/ISIF/PFM), 2015, : 215 - 217
[23] LiTaO3/Silicon composite wafers for the fabrication of low loss low TCF high coupling resonators for filter applications
Ballandras, S.
Courjon, E.
Baron, T.
Moulet, J. -B.
Signamarcheix, T.
Daniau, W.
PROCEEDINGS OF THE 2015 ICU INTERNATIONAL CONGRESS ON ULTRASONICS, 2015, 70 : 1007 - 1011
[24] Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL) SAW Resonators Using LiTaO3 Thin Plate on Quartz
Kadota, Michio
Ishii , Yoshimi
Shimatsu, Takehito
Uomoto, Miyuki
Tanaka, Shuji
2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
[25] High power durable saw filter with epitaxial aluminum electrodes on 38.5 rotated Y-X LiTaO3 by two-step process sequence in titanium intermediate layer.
Nakagawara, O
Saeki, M
Teramoto, A
Hasegawa, M
Ieki, H
2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 1734 - 1737

← 1 2 3 →