Bandwidth-tunable Filter Consisting of SAW Resonators and BaSrTiO3 Varactors Directly Fabricated on a LiTaO3 Wafer

被引：7

作者：

Kimura, Tetsuya ^{[1
]}

Kobayashi, Hideaki ^{[1
]}

Kishimoto, Yutaka ^{[1
]}

Kato, Hideyuki ^{[1
]}

Inaba, Masahiro

Hashimoto, Ken-ya ^{[2
]}

Matsumura, Takeshi ^{[3
]}

Hirano, Hideki ^{[4
]}

Kadota, Michio ^{[4
]}

Esashi, Masayoshi ^{[4
]}

Tanaka, Shuji ^{[4
]}

机构：

[1] Murata Mfg Co Ltd, Kyoto, Japan

[2] Chiba Univ, Grad Sch Engn, Chiba, Japan

[3] Natl Inst Informat & Commun Technol, Kanagawa, Japan

[4] Tohoku Univ, Microsyst Integrat Ctr, Sendai, Miyagi 980, Japan

来源：

2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2014年

关键词：

tunable filter; BaSrTiO3; LiTaO3;

D O I：

10.1109/ULTSYM.2014.0195

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600 degrees C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42 degrees YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42 degrees YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

引用

页码：795 / 798

页数：4

共 25 条

[1] Bandwidth-tunable SAW Filter Based on Wafer-level Transfer-integration of BaSrTiO3 Film for Wireless LAN System using TV White Space
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MIYASHIRO, F
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ONOE, A
ADACHI, T
FUJINUMA, K
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[6] Optimal cut for leaky SAW on LiTaO3 for high performance resonators and filters
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Endoh, G
Ueda, M
Ikata, O
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[7] LiTaO3 Capping Technology for Wafer Level Chip Size Packaging of SAW Filters
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[8] Temperature Behavior of SAW Resonators Based on LiNbO3/Quartz and LiTaO3/Quartz Substrates
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[9] POLARIZATION-INDEPENDENT ELECTROOPTICALLY TUNABLE WAVELENGTH FILTER IN LITAO3
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EKNOYAN, O
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[10] Temperature stable SAW devices using directly bonded LiTaO3/glass substrates
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Onishi, K.
Shimamura, T.
Tomita, Y.
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