Measurement uncertainty analysis for on-wafer TRL calibration using precision RF probing technique

被引：0
|
作者：
Sakamaki, Ryo [1 ]
Horibe, Masahiro [1 ]
机构：
[1] AIST, Natl Inst Adv Ind Sci & Technol, Res Inst Phys Measurement, 1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan
来源：
2018 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2018) | 2018年
关键词：
on-wafer measurement; S-parameter; uncertainty analysis; automatic probing system;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper demonstrates measurement uncertainty analysis in on-wafer measurement with detail discussion of probe tilt and stage rotation. Since ours measurement system can realize repeatable determination of probe position in X-, Y-, and Z-axes, influences of probe tilt and stage rotation can be evaluated with the system avoiding influences regard to variations in probe coordinates. Uncertainty-analysis algorithm was constructed for the analysis of each uncertainty contributor in case of conventional manual probing and precision probing technique. Consequently, measurement uncertainty with the precision probing technique was a half of conventional manual probing technique.
引用
收藏
页数：2
相关论文
共 50 条
  • [41] On-wafer electrooptic probing using rotational deformation modulation
    Chen, WH
    Kuo, WK
    Huang, SL
    Huang, YT
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (09) : 1228 - 1230
  • [42] Probe Positioner and Probe Tip Calibration for Traceable On-wafer Measurement
    Sakamaki, Ryo
    Horibe, Masahiro
    2019 92ND ARFTG MICROWAVE MEASUREMENT CONFERENCE (ARFTG), 2019,
  • [43] Measurement and Deembedding Technique for the on-wafer Characterization of Multiport Devices
    Cayron, Audrey
    Viallon, Christophe
    Ghannam, Ayad
    Magnani, Alessandro
    Parra, Thierry
    2020 IEEE 20TH TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS (SIRF), 2020, : 53 - 56
  • [44] Meander-Type Transmission Line Design for On-Wafer TRL Calibration up to 330GHz
    Cabbia, Marco
    Deng, Marina
    Fregonese, Sebastien
    Yadav, Chandan
    Curutchet, Arnaud
    De Matos, Magali
    Celi, Didier
    Zimmer, Thomas
    2020 50TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2020,
  • [45] On-wafer probing-kit for RF characterization of silicon photonic integrated transceivers
    Zhang, Shangjian
    Zhang, Chong
    Wang, Heng
    Liu, Yong
    Peters, Jon D.
    Bowers, John E.
    OPTICS EXPRESS, 2017, 25 (12): : 13340 - 13350
  • [46] 265-GHz, 10-dB Gain Amplifier in 65-nm CMOS Using On-wafer TRL Calibration
    Yagishita, Yohei
    Kawano, Yoichi
    Matsumura, Hiroshi
    Soga, Ikuo
    Suzuki, Toshihide
    Iwai, Taisuke
    2015 ASIA-PACIFIC MICROWAVE CONFERENCE (APMC), VOLS 1-3, 2015,
  • [47] A general on-wafer noise figure de-embedding technique with gain uncertainty analysis
    Mohd, S. Korakkottil Kunhi
    Zulkifli, T. Z. A.
    Sidek, O.
    IEICE ELECTRONICS EXPRESS, 2010, 7 (04): : 302 - 307
  • [48] Comparison of On-Wafer TRL Calibration to ISS SOLT Calibration With Open-Short De-Embedding up to 500 GHz
    Fregonese, Sebastien
    Deng, Marina
    De Matos, Magali
    Yadav, Chandan
    Joly, Simon
    Plano, Bernard
    Raya, Christian
    Ardouin, Bertrand
    Zimmer, Thomas
    IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 2019, 9 (01) : 89 - 97
  • [49] A Novel De-embedding Technique for On-Wafer Characterization of RF CMOS
    Loo, X. S.
    Yeo, K. S.
    Chew, K. W. J.
    Chan, L. H. K.
    Ong, S. N.
    Do, M. A.
    Boon, C. C.
    2009 INTERNATIONAL SOC DESIGN CONFERENCE (ISOCC 2009), 2009, : 29 - 32
  • [50] AN IMPROVED CALIBRATION TECHNIQUE FOR ON-WAFER LARGE-SIGNAL TRANSISTOR CHARACTERIZATION
    FERRERO, A
    PISANI, U
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1993, 42 (02) : 360 - 364
12345