Measurement uncertainty analysis for on-wafer TRL calibration using precision RF probing technique

被引：0
|
作者：
Sakamaki, Ryo [1 ]
Horibe, Masahiro [1 ]
机构：
[1] AIST, Natl Inst Adv Ind Sci & Technol, Res Inst Phys Measurement, 1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan
来源：
2018 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2018) | 2018年
关键词：
on-wafer measurement; S-parameter; uncertainty analysis; automatic probing system;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper demonstrates measurement uncertainty analysis in on-wafer measurement with detail discussion of probe tilt and stage rotation. Since ours measurement system can realize repeatable determination of probe position in X-, Y-, and Z-axes, influences of probe tilt and stage rotation can be evaluated with the system avoiding influences regard to variations in probe coordinates. Uncertainty-analysis algorithm was constructed for the analysis of each uncertainty contributor in case of conventional manual probing and precision probing technique. Consequently, measurement uncertainty with the precision probing technique was a half of conventional manual probing technique.
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页数：2
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