From the implementation to the characterisation and assembling of microfabricated optical alcali vapor cell for mems atomic clocks

被引：0

作者：

Nieradko, L. ^{[1
]}

Gorecki, C. ^{[1
]}

Dziuban, J. ^{[1
,2
]}

Douahi, A. ^{[1
]}

Giordano, V. ^{[1
]}

Beugnot, J. C. ^{[1
]}

Guerandel, S. ^{[3
]}

Moraja, M. ^{[4
]}

机构：

[1] Univ Franche Comte, CNRS, FEMTO ST, UMR 6174, F-25030 Besancon, France

[2] Wroclaw Univ Technol, Wroclaw, Poland

[3] SYRTE UMR CNRS 8630, Paris, France

[4] SAES Getters, Milan, Italy

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

atomic clock; wafer bonding; MEMS/MOEMS; coherent population trapping;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the fabrication of miniature alkali atom vapor cells using silicon micromachining and anodic bonding. Such cells consist of cavities etched in silicon, with internal volumes of few mm(3). Original technique for introducing cesium into the cells is described; based on local heating of alkali dispenser. Cesium absorption and coherent population trapping resonances were measured in the cells.

引用

页数：2

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