For an open focused thematic special issue of Microelectronic Engineering Micro/Nano Fabrication 2014, Short title: Nano Fab 2014 also including selected papers from the 40th Micro and Nano Engineering conference MNE 2014 Preface

被引:0
|
作者
Schift, Helmut [1 ]
Rupp, Jennifer L. M. [2 ]
机构
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
[2] Swiss Fed Inst Technol, Electrochem Mat, CH-8093 Zurich, Switzerland
关键词
D O I
10.1016/S0167-9317(15)00378-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:VIII / IX
页数:2
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