An open, focused, special issue including selected papers from Micro and Nano Engineering 2012 International Conference Preface

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作者：

Vieu, C.

Martin-Cerclier, C.

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来源：

MICROELECTRONIC ENGINEERING | 2013年 / 110卷

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D O I：

10.1016/j.mee.2013.06.006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：229 / 229

页数：1

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