Materials for Advanced Metallization 2014 (MAM 2014) A Microelectronic Engineering Open Special Focused Issue including selected papers from the 23rd European Workshop on Materials for Advanced Metallization 2014 (Chemnitz, Germany, March 2-5, 2014) Preface

被引：0

作者：

Schulz, Stefan E. ^{[1
]}

Hecker, Michael ^{[2
]}

Koerner, Heinrich ^{[3
]}

Wolf, Hermann ^{[4
]}

机构：

[1] Tech Univ Chemnitz, Chemnitz, Germany

[2] GLOBALFOUNDRIES, Dresden, Germany

[3] Infineon Technol AG, Munich, Germany

[4] Fraunhofer Inst Elect Nano Syst, Chemnitz, Germany

来源：

关键词：

D O I：

10.1016/S0167-9317(15)00179-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：VII / VII

页数：1