Carbon monoxide detection with CMOS integrated thin film SnO2 gas sensor

We present the integration of thin film SnO2 gas sensor on CMOS microchips. A spray pyrolysis process was used to deposit the gas sensitive film, with a thickness of 50 nm, on CMOS microhotplates. The exposure of the CMOS integrated gas sensor to carbon monoxide at different operating temperatures and humidity levels lead to a significant decrease in the sensor resistance. At an operating temperature of 375 degrees C a sensor response of almost 50% was achieved. The integration of the sensing material on CMOS microhotplates makes it possible to reduce the size and power consumption of metal oxide gas sensors. (C) 2017 Elsevier Ltd. All rights reserved.