Carbon monoxide detection with CMOS integrated thin film SnO2 gas sensor

被引：17

作者：

Lackner, Eva ^{[1
]}

Krainer, Johanna ^{[1
]}

Wimmer-Teubenbacher, Robert ^{[1
]}

Sosada, Florentyna ^{[1
]}

Deluca, Marco ^{[1
]}

Gspan, Christian ^{[2
]}

Rohracher, Karl ^{[3
]}

Wachmann, Ewald ^{[3
]}

Koeck, Anton ^{[1
]}

机构：

[1] Mat Ctr Leoben Forsch GmbH, Roseggerstr 12, A-8700 Leoben, Austria

[2] Inst Electron Microscopy & Fine Struct Res, Steyrergasse 17-3, A-8010 Graz, Austria

[3] Ams AG, Tobelbaderstr 30, A-8141 Premstatten, Austria

来源：

MATERIALS TODAY-PROCEEDINGS | 2017年 / 4卷 / 07期

关键词：

CMOS integration; tin dioxide; ultrathin films; carbon monoxide detection; microhotplate; SENSING PROPERTIES;

D O I：

10.1016/j.matpr.2017.08.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present the integration of thin film SnO2 gas sensor on CMOS microchips. A spray pyrolysis process was used to deposit the gas sensitive film, with a thickness of 50 nm, on CMOS microhotplates. The exposure of the CMOS integrated gas sensor to carbon monoxide at different operating temperatures and humidity levels lead to a significant decrease in the sensor resistance. At an operating temperature of 375 degrees C a sensor response of almost 50% was achieved. The integration of the sensing material on CMOS microhotplates makes it possible to reduce the size and power consumption of metal oxide gas sensors. (C) 2017 Elsevier Ltd. All rights reserved.

引用

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页码：7128 / 7131

页数：4

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