Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism

被引：18
|
作者：
Papaioannou, G. [1 ]
Giacomozzi, F. [2 ]
Papandreou, E. [1 ]
Margesin, B. [2 ]
机构：
[1] Univ Athens, Solid State Phys Sect, Dept Phys, Athens 15784, Greece
[2] Fdn B Kessler FBK, I-38123 Povo, Italy
来源：
APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 07期
关键词：
RF MEMS SWITCHES; RELIABILITY; MODEL;
D O I：
10.1063/1.3624830
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The paper investigates the actuation mechanism in floating electrode microelectromechanical system capacitive switches. It is demonstrated that in the pull-in state, the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and Fowler-Nordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt decrease of Fowler-Nordheim electric field intensity. This mechanism seems to be responsible for the very small difference with respect to the pull-in voltage. (C) 2011 American Institute of Physics. [doi:10.1063/1.3624830]
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页数：3
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