Design and modeling of XYθ H Type Stage Using 1 Rotational DOF Flexure Joint

被引：0
|
作者：
Kim, Kyoungchon [1 ]
Gweon, Daegab [1 ]
Choi, Namryoung [2 ]
Hong, Dongpyo [2 ]
机构：
[1] Korea Adv Inst Sci & Technol, Sch Mech Aerosp & Syst Engn, Taejon 305701, South Korea
[2] Chonbuk Natl Univ, Dept Mechan Syst Engn, Jeonju, South Korea
来源：
2011 INTERNATIONAL CONFERENCE ON PHOTONICS, 3D-IMAGING, AND VISUALIZATION | 2011年 / 8205卷
关键词：
H type stage; flexure joint; yaw motion; stage modeling; nano precision;
D O I：
10.1117/12.906153
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
It is important that high precision positioning system to cope with development of semiconductor and FPD manufacturing/inspection procedure. In this paper, the H type stage with flexure joint was proposed to compensate the yaw error in H type stage caused by manufacturing error, assembly error, and synchronous error. To implement the yaw motion in H type stage, 1 rotational DOF flexure joint which has high stiffness and endurance was proposed. Conceptual design of H type stage was performed to follow the criteria for precision machine design. The performance of H type stage was verified by real time experiment.
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页数：6
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