Design and modeling of XYθ H Type Stage Using 1 Rotational DOF Flexure Joint

被引：0

作者：

Kim, Kyoungchon ^{[1
]}

Gweon, Daegab ^{[1
]}

Choi, Namryoung ^{[2
]}

Hong, Dongpyo ^{[2
]}

机构：

[1] Korea Adv Inst Sci & Technol, Sch Mech Aerosp & Syst Engn, Taejon 305701, South Korea

[2] Chonbuk Natl Univ, Dept Mechan Syst Engn, Jeonju, South Korea

来源：

2011 INTERNATIONAL CONFERENCE ON PHOTONICS, 3D-IMAGING, AND VISUALIZATION | 2011年 / 8205卷

关键词：

H type stage; flexure joint; yaw motion; stage modeling; nano precision;

D O I：

10.1117/12.906153

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

It is important that high precision positioning system to cope with development of semiconductor and FPD manufacturing/inspection procedure. In this paper, the H type stage with flexure joint was proposed to compensate the yaw error in H type stage caused by manufacturing error, assembly error, and synchronous error. To implement the yaw motion in H type stage, 1 rotational DOF flexure joint which has high stiffness and endurance was proposed. Conceptual design of H type stage was performed to follow the criteria for precision machine design. The performance of H type stage was verified by real time experiment.

引用

页数：6

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