A SYSTEM BASED ON PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER FOR SOCIAL DISTANCING AND HUMAN-MACHINE INTERACTION

被引：0
|
作者：
Ruan, Tao [1 ,2 ]
Wang, Qi [1 ,2 ]
Xu, Qingda [1 ,2 ]
Yang, Bin [1 ,2 ]
Liu, Jingquan [1 ,2 ]
机构：
[1] Shanghai Jiao Tong Univ, Dept Micro Nanoelect, Shanghai, Peoples R China
[2] Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai, Peoples R China
来源：
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2021年
基金：
国家重点研发计划;
关键词：
piezoelectric Micromachined Ultrasound Transducer (pMUT); real-time proximity detection; social distancing; human-machine interaction;
D O I：
10.1109/TRANSDUCERS50396.2021.9495710
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A Lead Zirconate Titanate (PZT) based piezoelectric Micromachined Ultrasound Transducer (pMUT) array designed, fabricated and used for real-time proximity detection is presented in this paper. One-dimensional pMUT array containing 192 elements (24 column, each column contains 8 elements) was fabricated in silicon substrate. The size of the pMUT array is 2 X 0.8mm(2) and the resonant frequency of the pMUT elements is 7.54MHz. In order to get appropriate signal for data processing, back-end circuit is designed for the pMUT array in speciality. In the air, the distance of 15cm can be detected precisely and displayed on computer in real time and send an alaiin at setting distance. This system suggests that pMUTs have sufficient perfolinance for application in social distancing and human-machine interaction to avoid collision.
引用
收藏
页码：1251 / 1254
页数：4
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