High Precision Ion Beam Milling with Time of Flight Compensation

被引：1
|
作者：
Holtermann, Theresa [1 ]
Graupera, Anthony [1 ]
Rosenberg, Steve [1 ]
DiBattista, Michael [1 ]
机构：
[1] FEI Co, Hillsboro, OR USA
来源：
ISTFA 2008: CONFERENCE PROCEEDINGS FROM THE 34TH INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2008年
关键词：
D O I：
10.1361/cp2008istfa317
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：317 / 319
页数：3
相关论文
共 50 条
  • [41] A High-precision Method of Flight Arrival Time Estimation based on XGBoost
    Wang, Guangchao
    Liu, Kun
    Chen, Hui
    Wang, Yusheng
    Zhao, Qingtian
    PROCEEDINGS OF 2020 IEEE 2ND INTERNATIONAL CONFERENCE ON CIVIL AVIATION SAFETY AND INFORMATION TECHNOLOGY (ICCASIT), 2020, : 883 - 888
  • [42] Time-of-flight measurement with femtosecond pulses for high precision ranging LIDAR
    Lee, J.
    Kim, Y. -J.
    Lee, K.
    Lee, S.
    Kim, S. -W
    LIDAR REMOTE SENSING FOR ENVIRONMENTAL MONITORING XI, 2010, 7860
  • [43] Ion channeling effects on the focused ion beam milling of Cu
    Kempshall, BW
    Schwarz, SM
    Prenitzer, BI
    Giannuzzi, LA
    Irwin, RB
    Stevie, FA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03): : 749 - 754
  • [44] Focused ion beam milling of carbon fibres
    Huson, Mickey G.
    Church, Jeffrey S.
    Hillbrick, Linda K.
    Woodhead, Andrea L.
    Sridhar, Manoj
    Van De Meene, Allison M. L.
    MATERIALS CHEMISTRY AND PHYSICS, 2015, 168 : 193 - 200
  • [45] Broad Beam Ion Milling for Microstructure Characterization
    Hanke, Larry D.
    Schenk, Kurt H.
    Scholz, Dieter R.
    MATERIALS PERFORMANCE AND CHARACTERIZATION, 2016, 5 (05) : 767 - 779
  • [46] Focused helium ion beam milling and deposition
    Boden, S. A.
    Moktadir, Z.
    Bagnall, D. M.
    Mizuta, H.
    Rutt, H. N.
    MICROELECTRONIC ENGINEERING, 2011, 88 (08) : 2452 - 2455
  • [47] SIMULATION OF FOCUSED ION BEAM MILLING.
    Mueller, K.P.
    Weigmann, U.
    Burghause, H.
    1600, (05): : 1 - 4
  • [48] Focussed Ion Beam Milling of Silica Microspheres
    Kane, D. M.
    Chater, R. J.
    McPhail, D. S.
    PROCEEDINGS OF 2010 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAND 2010), 2010, : 109 - 110
  • [49] Lead time reduction by high precision 5-axis milling of a prototype gear
    Malek, Olivier
    Mielnik, Krist
    Martens, Kristof
    Jacobs, Tom
    Bouquet, Jan
    Auwers, Walter
    Ten Haaf, Peter
    Lauwers, Bert
    7TH HPC 2016 - CIRP CONFERENCE ON HIGH PERFORMANCE CUTTING, 2016, 46 : 440 - 443
  • [50] Beam optical design of in-flight fragment separator for high-power heavy ion beam
    Yun, C. C.
    Kim, Mi-Jung
    Kim, D. G.
    Song, J. S.
    Kim, Myeong-Jin
    Kim, J. W.
    Kim, J. R.
    Wan, W.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 317 : 342 - 348
12345