High Precision Ion Beam Milling with Time of Flight Compensation

被引：1
|
作者：
Holtermann, Theresa [1 ]
Graupera, Anthony [1 ]
Rosenberg, Steve [1 ]
DiBattista, Michael [1 ]
机构：
[1] FEI Co, Hillsboro, OR USA
来源：
ISTFA 2008: CONFERENCE PROCEEDINGS FROM THE 34TH INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2008年
关键词：
D O I：
10.1361/cp2008istfa317
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：317 / 319
页数：3
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