Synthesis of carbon nanowalls by hot-wire chemical vapor deposition

被引：25
|
作者：
Itoh, Takashi [1 ]
机构：
[1] Gifu Univ, Gifu 5011193, Japan
来源：
THIN SOLID FILMS | 2011年 / 519卷 / 14期
关键词：
Carbon nanowall; Hot-wire CVD; Graphene; Hydrogen radical; Substrate surface temperature; DIAMOND; GROWTH; FILMS; CVD;
D O I：
10.1016/j.tsf.2011.01.308
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Carbon nanowall (CNW) is a carbon nano-material which has a wall structure that stood on substrates. CNWs can be synthesized by hot-wire chemical vapor deposition (HWCVD) using methane without hydrogen dilution. The synthesis of CNWs by HWCVD is discussed along with reviewing the experimental results. The growth of CNWs is affected by hydrogen dilution ratio and substrate surface temperature. Based on these results, it is suggested that hydrogen radical density and substrate surface temperature are the important parameters for the synthesis of CNWs. The growth process of CNWs is also discussed. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：4589 / 4593
页数：5
相关论文
共 50 条
  • [1] Hot-wire chemical vapor deposition of carbon nanotubes
    Dillon, AC
    Mahan, AH
    Alleman, JL
    Heben, MJ
    Parilla, PA
    Jones, KM
    THIN SOLID FILMS, 2003, 430 (1-2) : 292 - 295
  • [2] Attempt to synthesize carbon nanotubes by hot-wire chemical vapor deposition
    Yokomichi, H
    Sakai, F
    Ichihara, M
    Kishimoto, N
    THIN SOLID FILMS, 2001, 395 (1-2) : 253 - 256
  • [3] Processes in silicon deposition by hot-wire chemical vapor deposition
    van Veenendaal, PATT
    Schropp, REI
    CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 2002, 6 (05): : 465 - 470
  • [4] Fabrication of amorphous carbon nitride films by hot-wire chemical vapor deposition
    Yokomichi, H
    Masuda, A
    Kishimoto, N
    THIN SOLID FILMS, 2001, 395 (1-2) : 249 - 252
  • [5] Deposition of amorphous silicon films by hot-wire chemical vapor deposition
    Feenstra, KF
    Schropp, REI
    Van der Weg, WF
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (09) : 6843 - 6852
  • [6] Polymeric nanocoatings by hot-wire chemical vapor deposition (HWCVD)
    Lau, KKS
    Mao, Y
    Lewis, HGP
    Murthy, SK
    Olsen, BD
    Loo, LS
    Gleason, KK
    THIN SOLID FILMS, 2006, 501 (1-2) : 211 - 215
  • [7] Synthesis of indium-catalyzed Si nanowires by hot-wire chemical vapor deposition
    Chong, Su Kong
    Goh, Boon Tong
    Aspanut, Zarina
    Muhamad, Muhamad Rasat
    Dee, Chang Fu
    Rahman, Saadah Abdul
    MATERIALS LETTERS, 2011, 65 (15-16) : 2452 - 2454
  • [8] Amorphous silicon nitride deposited by hot-wire chemical vapor deposition
    Liu, FZ
    Ward, S
    Gedvilas, L
    Keyes, B
    To, B
    Wang, Q
    Sanchez, E
    Wang, SL
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (05) : 2973 - 2979
  • [9] A numerical model for hot-wire chemical vapor deposition of amorphous silicon
    Goodwin, DG
    AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999, 1999, 557 : 79 - 84
  • [10] Hot-wire chemical vapor deposition of silicon nanoparticles on fused silica
    Salivati, Navneethakrishnan
    An, Yong Q.
    Downer, Michael C.
    Ekerdt, John G.
    THIN SOLID FILMS, 2009, 517 (12) : 3481 - 3483
12345