Plasma-assisted growth and nitrogen doping of graphene films

被引:42
|
作者
Wang, C. D.
Yuen, M. F.
Ng, T. W.
Jha, S. K.
Lu, Z. Z.
Kwok, S. Y.
Wong, T. L.
Yang, X.
Lee, C. S.
Lee, S. T.
Zhang, W. J. [1 ]
机构
[1] City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Hong Kong, Hong Kong, Peoples R China
基金
中国国家自然科学基金;
关键词
CHEMICAL-VAPOR-DEPOSITION; DOPED GRAPHENE; EPITAXIAL GRAPHENE; CARBON-SOURCES; LARGE-AREA;
D O I
10.1063/1.4729823
中图分类号
O59 [应用物理学];
学科分类号
摘要
Microwave plasmas were employed to synthesize single- or double-layer graphene sheets on copper foils using a solid carbon source, polymethylmetacrylate. The utilization of reactive plasmas enables the graphene growth at reduced temperatures as compared to conventional thermal chemical vapor deposition processes. The effects of substrate temperature on graphene quality were studied based on Raman analysis, and a reduction of defects at elevated temperature was observed. Moreover, a facile approach to incorporate nitrogen into graphene by plasma treatment in a nitrogen/hydrogen gas mixture was demonstrated, and most of the nitrogen atoms were verified to be pyridinelike in carbon network. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4729823]
引用
收藏
页数:5
相关论文
共 50 条
  • [21] Modeling plasma-assisted growth of graphene-carbon nanotube hybrid
    Tewari, Aarti
    PHYSICS OF PLASMAS, 2016, 23 (08)
  • [22] Plasma-Assisted Nitrogen Doping of Ketjen Black to Promote Electrocatalytic Oxygen Reduction Reaction
    Fan, Lei
    Zhang, Bo
    Zhang, Lu
    Han, Wenhu
    Sun, Yuhao
    Song, Wenyu
    Xiao, Chunhui
    Zhang, Guanjun
    2023 6TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING AND GREEN ENERGY, CEEGE, 2023, : 23 - 28
  • [23] Growth rate independence of Mg doping in GaN grown by plasma-assisted MBE
    Turski, Henryk
    Muziol, Grzegorz
    Siekacz, Marcin
    Wolny, Pawel
    Szkudlarek, Krzesimir
    Feduniewicz-Zmuda, Anna
    Dybko, Krzysztof
    Skierbiszewski, Czeslaw
    JOURNAL OF CRYSTAL GROWTH, 2018, 482 : 56 - 60
  • [24] PLASMA-ASSISTED DEPOSITION OF DIELECTRIC FILMS
    ADAMS, AC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C312 - C312
  • [25] PLASMA-ASSISTED DEPOSITION OF DIELECTRIC FILMS
    ADAMS, AC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (08) : C354 - C354
  • [26] Plasma-assisted MBE growth of InN films and InAlN/InN heterostructures
    Higashiwaki, M
    Matsui, T
    JOURNAL OF CRYSTAL GROWTH, 2003, 251 (1-4) : 494 - 498
  • [27] Growth of Semiconducting Diamond Films by Plasma-Assisted Vapor Deposition..
    Sato, Y.
    Kamo, M.
    Setaka, N.
    Ceramurgia, 1988, 18 (02): : 84 - 87
  • [28] Growth of ScN epitaxial films by plasma-assisted molecular beam epitaxy
    Hall, J. L.
    Moram, M. A.
    Sanchez, A.
    Novikov, S. V.
    Kent, A. J.
    Foxon, C. T.
    Humphreys, C. J.
    Campion, R. P.
    JOURNAL OF CRYSTAL GROWTH, 2009, 311 (07) : 2054 - 2057
  • [29] High nitrogen flux plasma-assisted molecular beam epitaxy growth of InxGa1-xN films
    Jorgensen, Kelsey F.
    Bonef, Bastien
    Speck, James S.
    JOURNAL OF CRYSTAL GROWTH, 2020, 546
  • [30] Impact of kinetics on the growth of GaN on graphene by plasma-assisted molecular beam epitaxy
    Gruart, M.
    Feldberg, N.
    Gayral, B.
    Bougerol, C.
    Pouget, S.
    Bellet-Amalric, E.
    Garro, N.
    Cros, A.
    Okuno, H.
    Daudin, B.
    NANOTECHNOLOGY, 2020, 31 (11)