Electrical activation and electron spin resonance measurements of implanted bismuth in isotopically enriched silicon-28

被引:46
|
作者
Weis, C. D. [1 ,2 ]
Lo, C. C. [1 ,3 ]
Lang, V. [4 ]
Tyryshkin, A. M. [5 ]
George, R. E. [6 ]
Yu, K. M. [7 ]
Bokor, J. [3 ]
Lyon, S. A. [5 ]
Morton, J. J. L. [4 ,6 ]
Schenkel, T. [1 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Accelerator & Fus Res, Berkeley, CA 94720 USA
[2] Ilmenau Univ Technol, Dept Micro & Nanoelect Syst, D-98684 Ilmenau, Germany
[3] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[4] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[5] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
[6] Univ Oxford, Dept Phys, Clarendon Lab, CAESR, Oxford OX1 3PU, England
[7] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
基金
英国工程与自然科学研究理事会;
关键词
QUANTUM COMPUTER; NUCLEAR-SPIN; SILICON; DEFECTS;
D O I
10.1063/1.4704561
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have performed continuous wave and pulsed electron spin resonance measurements of implanted bismuth donors in isotopically enriched silicon-28. Donors are electrically activated via thermal annealing with minimal diffusion. Damage from bismuth ion implantation is repaired during thermal annealing as evidenced by narrow spin resonance linewidths (B-pp = 12 mu T) and long spin coherence times (T-2 = 0.7 ms, at temperature T = 8 K). The results qualify ion implanted bismuth as a promising candidate for spin qubit integration in silicon. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4704561]
引用
下载
收藏
页数:4
相关论文
共 50 条
  • [1] Electrical activation and electron spin resonance measurements of arsenic implanted in silicon
    Hori, Masahiro
    Uematsu, Masashi
    Fujiwara, Akira
    Ono, Yukinori
    APPLIED PHYSICS LETTERS, 2015, 106 (14)
  • [2] Activation and electron spin resonance of near-surface implanted bismuth donors in silicon
    Holmes, D.
    Lawrie, W. I. L.
    Johnson, B. C.
    Asadpoordarvish, A.
    McCallum, J. C.
    McCamey, D. R.
    Jamieson, D. N.
    PHYSICAL REVIEW MATERIALS, 2019, 3 (08)
  • [3] Inductive Measurement of Optically Hyperpolarized Phosphorous Donor Nuclei in an Isotopically Enriched Silicon-28 Crystal
    Gumann, P.
    Patange, O.
    Ramanathan, C.
    Haas, H.
    Moussa, O.
    Thewalt, M. L. W.
    Riemann, H.
    Abrosimov, N. V.
    Becker, P.
    Pohl, H-J
    Itoh, K. M.
    Cory, D. G.
    PHYSICAL REVIEW LETTERS, 2014, 113 (26)
  • [4] Electron paramagnetic resonance in monoisotope high-purity silicon-28
    Devyatykh, GG
    Gusev, AV
    Khokhlov, AF
    Maksimov, GA
    Ezhevskii, AA
    Guseinov, DV
    Dianov, EM
    DOKLADY PHYSICAL CHEMISTRY, 2001, 376 (1-3) : 8 - 11
  • [5] Electron Paramagnetic Resonance in Monoisotope High-Purity Silicon-28
    G. G. Devyatykh
    A. V. Gusev
    A. F. Khokhlov
    G. A. Maksimov
    A. A. Ezhevskii
    D. V. Guseinov
    E. M. Dianov
    Doklady Physical Chemistry, 2001, 376 : 8 - 11
  • [6] ESR measurements of phosphorus dimers in isotopically enriched 28Si silicon
    Shankar, S.
    Tyryshkin, A. M.
    Lyon, S. A.
    PHYSICAL REVIEW B, 2015, 91 (24):
  • [7] Electron paramagnetic resonance study of silicon-28 single crystal for realization of the kilogram
    Mizushima, Shigeki
    Umeda, Takahide
    METROLOGIA, 2022, 59 (02)
  • [8] ELECTRON-SPIN-RESONANCE STUDIES OF ISOTOPICALLY ENRICHED TRI-ARYLTIN RADICALS
    ELHEFNAWI, SA
    BRAMWELL, FB
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1986, 191 : 400 - INOR
  • [9] ELECTRICAL ACTIVATION OF BISMUTH IMPLANTED INTO SILICON BY RAPID THERMAL ANNEALING AND KINETICS OF DEFECTS
    DESOUZA, JP
    FICHTNER, PFP
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) : 119 - 122
  • [10] Electrical activation of bismuth implanted into silicon by rapid thermal annealing and kinetics of defects
    de, Souza, J.P.
    Fichtner, P.F.P.
    1600, (74):