Characterization of B-C-N hybrid prepared by ion implantation

被引：6

作者：

Shimoyama, I

Baba, YJ

Tetsuhiro, S

Nath, KG

Sasaki, M

Okuno, K

机构：

[1] Japan Atom Energy Res Inst, Ibaraki 3191195, Japan

[2] Shizuoka Univ, Fac Sci, Oya, Shizuoka 4228529, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2003年 / 21卷 / 06期

关键词：

D O I：

10.1116/1.1611887

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ion implantation method is applied to synthesize B-C-N hybrids and their electronic structures are characterized by x-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, a variety of bonding combinations including B-N, B-C, and C-N are observed. This proved that B-C-N hybrids are formed by this method. (C) 2003 American Vacuum Society.

引用

页码：1843 / 1848

页数：6

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