A unified short-channel compact model for cylindrical surrounding-gate MOSFET

被引:30
|
作者
Cousin, Bastien [1 ,2 ]
Reyboz, Marina [2 ]
Rozeau, Olivier [1 ]
Jaud, Marie-Anne [1 ]
Ernst, Thomas [1 ]
Jomaah, Jalal [2 ]
机构
[1] CEA, LETI, MINATEC, F-38054 Grenoble, France
[2] INPG, MINATEC, IMEP LAHC, F-38016 Grenoble, France
关键词
Device modeling; Gate-all-around MOSFET; Short-channel effects; Surface potential model; ALL-AROUND MOSFETS; SOI MOSFETS;
D O I
10.1016/j.sse.2010.11.008
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the first time, a continuous and explicit model valid in all operating regions, for undoped short-channel cylindrical gate-all-around (GAA) MOSFETs, is presented in this study. From a two-dimensional analysis, the threshold voltage roll-off, the drain-induced barrier lowering (DIBL) and the subthreshold swing are explicitly modeled. Short-channel effects are then implemented into a continuous drain-current model based on an effective surface potential approach using the gradual channel approximation. Improving the model behavior in the saturation operating region by accounting the channel pinch-off displacement, channel length modulation is studied and implemented as well. Analytical results are compared to TCAD-Atlas numerical simulations and validate the short-channel model in all operating modes making it suitable for circuit design simulations. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:40 / 46
页数:7
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