Structure of Diamond-Like Silicon-Carbon Films Alloyed by Vanadium

被引：7
|
作者：
Zhigalina, O. M. [1 ,2 ]
Khmelenin, D. N. [1 ]
Pimenov, S. M. [3 ]
Shupegin, M. L. [4 ,5 ]
Dyachkova, I. G. [1 ,5 ]
Asadchikov, V. E. [1 ]
机构：
[1] Russian Acad Sci, Shubnikov Inst Crystallog, Fed Res Ctr Crystallog & Photon, Moscow 119333, Russia
[2] Bauman Moscow State Tech Univ, Moscow 105005, Russia
[3] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia
[4] Natl Res Univ, Moscow Power Engn Inst, Moscow 111250, Russia
[5] Res Inst Adv Mat & Technol, Moscow 115054, Russia
来源：
CRYSTALLOGRAPHY REPORTS | 2018年 / 63卷 / 05期
基金：
俄罗斯科学基金会;
关键词：
D O I：
10.1134/S1063774518050334
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The structure of diamond-like silicon-carbon films formed on silicon substrates by magnetron and plasmatron codeposition using a closed-field magnetron and a plasmatron activated by tungsten cathode has been studied by transmission electron microscopy. The main feature of the films alloyed by vanadium to concentrations of 12-31 at % was found to be a layered structure of the film cross section. It was established that vanadium alloying leads to the formation of vanadium carbide (VC) nanocrystals; the nanocrystal size increases from 1-2 to 10 nm. At the maximum vanadium content, VC nanocrystals have an anisotropic shape: they are extended in the direction perpendicular to the film-substrate interface.
引用
收藏
页码：796 / 801
页数：6
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