Structure of Diamond-Like Silicon-Carbon Films Alloyed by Vanadium

被引：7

作者：

Zhigalina, O. M. ^{[1
,2
]}

Khmelenin, D. N. ^{[1
]}

Pimenov, S. M. ^{[3
]}

Shupegin, M. L. ^{[4
,5
]}

Dyachkova, I. G. ^{[1
,5
]}

Asadchikov, V. E. ^{[1
]}

机构：

[1] Russian Acad Sci, Shubnikov Inst Crystallog, Fed Res Ctr Crystallog & Photon, Moscow 119333, Russia

[2] Bauman Moscow State Tech Univ, Moscow 105005, Russia

[3] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia

[4] Natl Res Univ, Moscow Power Engn Inst, Moscow 111250, Russia

[5] Res Inst Adv Mat & Technol, Moscow 115054, Russia

来源：

CRYSTALLOGRAPHY REPORTS | 2018年 / 63卷 / 05期

基金：

俄罗斯科学基金会;

关键词：

D O I：

10.1134/S1063774518050334

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The structure of diamond-like silicon-carbon films formed on silicon substrates by magnetron and plasmatron codeposition using a closed-field magnetron and a plasmatron activated by tungsten cathode has been studied by transmission electron microscopy. The main feature of the films alloyed by vanadium to concentrations of 12-31 at % was found to be a layered structure of the film cross section. It was established that vanadium alloying leads to the formation of vanadium carbide (VC) nanocrystals; the nanocrystal size increases from 1-2 to 10 nm. At the maximum vanadium content, VC nanocrystals have an anisotropic shape: they are extended in the direction perpendicular to the film-substrate interface.

引用

页码：796 / 801

页数：6

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