The significant effect of film thickness on the properties of chalcopyrite thin absorbing films deposited by RF magnetron sputtering

被引:5
|
作者
Mishra, P. K. [1 ]
Prasad, J. N. [1 ]
Dave, V. [2 ]
Chandra, R. [3 ]
Choudhary, A. K. [3 ]
机构
[1] Ranchi Univ, Univ Dept Phys, Ranchi 834008, Bihar, India
[2] Coll Technol & Engn, Dept Elect Engn, Udaipur 313001, India
[3] Indian Inst Technol, Inst Instrumentat Ctr, Roorkee 247667, Uttar Pradesh, India
关键词
CIGS; Film thickness; XRD; Band gap; ELECTRICAL-PROPERTIES; SOLAR-CELL; OPTOELECTRONIC PROPERTIES; SELENIZATION; TEMPERATURE; FABRICATION; ROUTE;
D O I
10.1016/j.mssp.2015.02.047
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, thickness dependent structural, surface morphological, optical and electrical properties of RF magnetron sputtered CuIn0.8Ga0.2Se2 (CIGS) thin films were studied using X-ray diffraction (XRD), Transmission electron microscopy (TEM), Field emission scanning electron microscopy (FE-SEM), Atomic force microscopy (AFM), UV-vis-NIR spectrophotometer and Keithley electrical measurement unit. The peak intensity along (112) plane as well as crystallite size was found to increase with thickness. However, for higher film thickness >116 pm, crystallinity reduced due to higher % of Cu content. TEM analysis confirmed pollycrysallinity as well as chalcopyrite phase of deposited films. The band gap was found to decrease with increase in thickness yielding a minimum value of 1.12 eV for film thickness 1.70 mu m. The I-V characteristics showed the ohmic behavior of metal semiconductor contact with higher conductivity for film thickness 1.16 tim. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:350 / 358
页数:9
相关论文
共 50 条
  • [1] Effects of film thickness and sputtering power on properties of ITO thin films deposited by RF magnetron sputtering without oxygen
    Amalathas, Amalraj Peter
    Alkaisi, Maan M.
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2016, 27 (10) : 11064 - 11071
  • [2] Effects of film thickness and sputtering power on properties of ITO thin films deposited by RF magnetron sputtering without oxygen
    Amalraj Peter Amalathas
    Maan M. Alkaisi
    [J]. Journal of Materials Science: Materials in Electronics, 2016, 27 : 11064 - 11071
  • [3] Effect of thickness on the dielectric properties of bismuth magnesium niobium thin films deposited by rf magnetron sputtering
    Li, Lingxia
    Xu, Dan
    Yu, Shihui
    Dong, Helei
    Jin, Yuxin
    [J]. CERAMICS INTERNATIONAL, 2014, 40 (08) : 12029 - 12034
  • [4] Thickness dependent ferroelectric properties of BSTO thin films deposited by RF magnetron sputtering
    Jong-Yoon Ha
    Ji-Won Choi
    Chong-Yun Kang
    S. F. Karmanenko
    Doo Jin Choi
    Seok-Jin Yoon
    Hyun-Jai Kim
    [J]. Journal of Electroceramics, 2006, 17 : 141 - 144
  • [5] Thickness dependent ferroelectric properties of BSTO thin films deposited by RF magnetron sputtering
    Ha, Jong-Yoon
    Choi, Ji-Won
    Kang, Chong-Yun
    Karmanenko, S. F.
    Choi, Doo Jin
    Yoon, Seok-Jin
    Kim, Hyun-Jai
    [J]. JOURNAL OF ELECTROCERAMICS, 2006, 17 (2-4) : 141 - 144
  • [6] Thickness Optimization of AlN Thin Films Deposited By RF Magnetron Sputtering
    Uzgur, Sinem
    Hutson, David
    Kirk, Katherine
    [J]. 2012 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS HELD JOINTLY WITH 11TH IEEE ECAPD AND IEEE PFM (ISAF/ECAPD/PFM), 2012,
  • [7] Effect of thickness on optoelectrical properties of Nbdoped indium tin oxide thin films deposited by RF magnetron sputtering
    李士娜
    马瑞新
    马春红
    李东冉
    肖玉琴
    贺良伟
    朱鸿民
    [J]. Optoelectronics Letters, 2013, 9 (03) : 198 - 200
  • [8] Effect of Deposition Parameters on the Properties of TiN Thin Films Deposited by rf Magnetron Sputtering
    Lee, Do Young
    Chung, Chee Won
    [J]. KOREAN CHEMICAL ENGINEERING RESEARCH, 2008, 46 (04): : 676 - 680
  • [9] Effect of thickness on structure and optical properties of PbSe thin film deposited by magnetron sputtering
    [J]. Feng, W.-R. (fengwenran@bipt.edu.cn), 1600, Chinese Ceramic Society (43):
  • [10] Optical properties of fluoride thin films deposited by RF magnetron sputtering
    Iwahori, Koichiro
    Furuta, Masahiro
    Taki, Yusuke
    Yamamura, Tomoyuki
    Tanaka, Akira
    [J]. APPLIED OPTICS, 2006, 45 (19) : 4598 - 4602