Shape evolution of microbumps

被引:0
|
作者
Kondo, K [1 ]
Matsumoto, T [1 ]
Tanaka, Z [1 ]
机构
[1] Okayama Univ, Dept Appl Chem, Okayama 7000082, Japan
关键词
high density bump; gold; electrodeposition;
D O I
10.1252/kakoronbunshu.29.692
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Bumps are high-density connectors between semiconductor devices and print-circuit boards. We have studied the effects of passivation ally layer heights on electrodeposited Au bumps, both experiment and by current density simulation.
引用
收藏
页码:692 / 694
页数:3
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