Electron emission from patterned diamond flat cathodes

被引：3
|
作者：
Tolt, ZL [1 ]
Fink, RL [1 ]
Yaniv, Z [1 ]
机构：
[1] FEPET Inc, Austin, TX 78727 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 03期
关键词：
D O I：
10.1116/1.590032
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A substrate predesposition treatment process is used to pattern and enhance the emission properties of diamond flat cathode films. An advantage of this process is that the diamond grit abrasive process steps are not required for the enhanced emission properties. The predesposition treatment also eliminates the possibility of degrading cathode performance resulting from postgrowth processes.
引用
收藏
页码：1197 / 1198
页数：2
相关论文
共 50 条
  • [1] Electron emission from patterned diamond flat cathodes
    Tolt, Z. Li
    Fink, R.L.
    Yaniv, Zvi
    [J]. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1998, 16 (03):
  • [2] Electron emission from patterned diamond flat cathodes
    Tolt, ZL
    Fink, RL
    Yaniv, Z
    [J]. IVMC'97 - 1997 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, 1997, : 171 - 175
  • [3] Localized emission from flat diamond cathodes
    Bilbro, Griff L.
    Nemanich, Robert J.
    [J]. DIAMOND AND RELATED MATERIALS, 2006, 15 (09) : 1418 - 1423
  • [4] Modeling electron emission and surface effects from diamond cathodes
    Dimitrov, D. A.
    Smithe, D.
    Cary, J. R.
    Ben-Zvi, I.
    Rao, T.
    Smedley, J.
    Wang, E.
    [J]. JOURNAL OF APPLIED PHYSICS, 2015, 117 (05)
  • [5] SELECTIVE EMISSION OF ELECTRONS FROM PATTERNED NEGATIVE ELECTRON-AFFINITY CATHODES
    SANTOS, EJP
    MACDONALD, NC
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (04) : 607 - 611
  • [6] Electron field emission from a patterned diamondlike carbon flat cathode
    Mao, DS
    Zhao, J
    Li, W
    Ran, CX
    Wang, X
    Liu, XH
    Zhou, JY
    Fan, Z
    Zhu, YK
    Li, Q
    Xu, JF
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02): : 311 - 314
  • [7] Electron field emission from a patterned diamond-like carbon flat thin film using a Ti interfacial layer
    Mao, DS
    Wang, X
    Li, W
    Liu, XH
    Li, Q
    Xu, JF
    Okano, K
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (05): : 2420 - 2423
  • [8] A new surface electron-emission mechanism in diamond cathodes
    M. W. Geis
    N. N. Efremow
    K. E. Krohn
    J. C. Twichell
    T. M. Lyszczarz
    R. Kalish
    J. A. Greer
    M. D. Tabat
    [J]. Nature, 1998, 393 : 431 - 435
  • [9] A new surface electron-emission mechanism in diamond cathodes
    Geis, MW
    Efremow, NN
    Krohn, KE
    Twichell, JC
    Lyszczarz, TM
    Kalish, R
    Greer, JA
    Tabat, MD
    [J]. NATURE, 1998, 393 (6684) : 431 - 435
  • [10] Field electron emission from flat metal cathodes covered by thin polymer films
    Ionov, AN
    Popov, EO
    Svetlichnyi, VM
    Pashkevich, AA
    [J]. TECHNICAL PHYSICS LETTERS, 2004, 30 (07) : 566 - 568
12345