Accurate analysis of silicon, VLSI-technology compatible spiral inductors

被引:0
|
作者
Guasticchi, B [1 ]
Ciampolini, P [1 ]
Roselli, L [1 ]
Stopponi, G [1 ]
机构
[1] Univ Perugia, Dipartimento Ingn Elettr & Informaz, I-06125 Perugia, Italy
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, the application of a full-wave electromagnetic simulator to the analysis of solid-state (CMOS-compatible) inductors is described. By means of the simulation, performance of actual inductors has been correctly predicted and characterization of equivalent-circuit components has been carried out. Impact of some design options on the inductor performance has been discussed. Detrimental effects related to the specific technology adopted have also been evaluated and physically interpreted.
引用
收藏
页码:1157 / 1160
页数:4
相关论文
共 50 条
  • [11] Analysis and modeling of thick-metal spiral inductors on silicon
    Scuderi, Angelo
    Biondi, Tonio
    Ragonese, Egidio
    Palmisano, Giuseppe
    35th European Microwave Conference, Vols 1-3, Conference Proceedings, 2005, : 81 - 84
  • [12] Spiral inductors on silicon for wireless communications
    Trabulo, PM
    Duraes, DA
    Mendes, PM
    Garrido, PJ
    Correia, JH
    ADVANCED MATERIALS FORUM II, 2004, 455-456 : 116 - 119
  • [13] On the design of RF spiral inductors on silicon
    Burghartz, JN
    Rejaei, B
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (03) : 718 - 729
  • [14] Optimizing the design of spiral inductors on silicon
    Post, JE
    IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-ANALOG AND DIGITAL SIGNAL PROCESSING, 2000, 47 (01): : 15 - 17
  • [15] A scalable model for silicon spiral inductors
    Scuderi, A
    Biondi, T
    Ragonese, E
    Palmisano, G
    2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2003, : 2117 - 2120
  • [16] Spiral inductors on silicon - Status and trends
    Burghartz, JN
    INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 1998, 8 (06) : 422 - 432
  • [17] Physical modeling of spiral inductors on silicon
    Yue, CP
    Wong, SS
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (03) : 560 - 568
  • [18] RF inductors and capacitors integrated on silicon chip by CMOS compatible Cu interconnect technology
    Guo, LH
    Yu, MB
    Dow, FP
    MICROELECTRONICS RELIABILITY, 2003, 43 (03) : 367 - 370
  • [19] Design and fabrication of deep submicron CMOS technology compatible suspended high-Q spiral inductors
    Hsieh, MC
    Fang, YK
    Chen, CH
    Chen, SM
    Yeh, WK
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2004, 51 (03) : 324 - 331
  • [20] Temperature dependence of Q in spiral inductors fabricated in a silicon-germanium/BiCMOS technology
    Groves, R
    Stein, K
    Harame, D
    Jadus, D
    PROCEEDINGS OF THE 1996 BIPOLAR/BICMOS CIRCUITS AND TECHNOLOGY MEETING, 1996, : 153 - 156