Atom probe tomography today

被引：88

作者：

Cerezo, Alfred ^{[1
]}

Clifton, Peter H. ^{[2
]}

Galtrey, Mark J. ^{[3
]}

Humphreys, Colin J. ^{[3
]}

Kelly, Thomas F. ^{[2
]}

Larson, David J. ^{[2
]}

Lozano-Perez, Sergio ^{[1
]}

Marquis, Emmanuelle A. ^{[1
]}

Oliver, Rachel A. ^{[3
]}

Sha, Gang ^{[1
]}

Thompson, Keith ^{[2
]}

Zandbergen, Mathijs ^{[1
]}

Alvis, Roger L. ^{[2
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[2] Imago Sci Instruments, Madison, WI 53711 USA

[3] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England

来源：

MATERIALS TODAY | 2007年 / 10卷 / 12期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1016/S1369-7021(07)70306-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This review aims to describe and illustrate the advances in the application of atom probe tomography that have been made possible by recent developments, particularly in specimen preparation techniques (using dual-beam focused-ion beam instruments) but also of the more routine use of laser pulsing. The combination of these two developments now permits atomic-scale investigation of site-specific regions within engineering alloys (e.g. at grain boundaries and in the vicinity of cracks) and also the atomic-level characterization of interfaces in multilayers, oxide films, and semiconductor materials and devices.

引用

页码：36 / 42

页数：7

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