Numerical Study of the Impact of Process Variations on the Motional Resistance of Weakly Coupled MEMS Resonators

被引：0

作者：

Erbes, Andreja ^{[1
]}

Thiruvenkatanathan, Pradyumna ^{[1
]}

Seshia, Ashwin A. ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC) | 2013年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents a numerical study of the impact of process-induced variations on the achievable motional resistance R-x of one-dimensional, cyclic and cross-coupled architectures of electrostatically transduced MEMS resonators operating in the 250 kHz range. Monte Carlo numerical simulations which accounted for up to 0.75% variation in critical resonator feature sizes were initiated on 1, 2, 3, 4, 5 and 9 coupled MEMS resonators for three distinct coupling architectures. Improvements of 100X in the spread of R-x and 2.7X in mean achievable R-x are reported for the case of 9 resonators when implemented in the cross-coupled topology, as opposed to the traditional one-dimensional chain.

引用

页码：674 / 677

页数：4

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