Internal reflection ellipsometry in air and water ambient

被引：3
|
作者：
Otsuki, Soichi [1 ]
Ishikawa, Mitsuru [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Hlth Res Inst, Kagawa 7610395, Japan
来源：
OPTICS LETTERS | 2010年 / 35卷 / 24期
关键词：
THICKNESS MEASUREMENTS; REFRACTIVE-INDEX; ADSORPTION; LAYERS;
D O I：
10.1364/OL.35.004226
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We measured a multilayer sample in air and water ambient below the critical angle of incidence based on internal reflection ellipsometry (IRE). Measurements with varying incident angle and varying wavelength both provided values by the fitting for refractive indices and thicknesses of layers consistent with design or theoretical ones. This verified that IRE is useful in measurement and analysis of thin films on transparent substrates and especially effective to study thin films at transparent substrate-liquid interfaces. (C) 2010 Optical Society of America
引用
收藏
页码：4226 / 4228
页数：3
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