Deep drilling of metals by femtosecond laser pulses

被引：168
|
作者：
Kamlage, G [1 ]
Bauer, T [1 ]
Ostendorf, A [1 ]
Chichkov, BN [1 ]
机构：
[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 02期
关键词：
D O I：
10.1007/s00339-003-2120-x
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Results of recent investigations on deep drilling of metals by femtosecond laser pulses are reported. At high laser fluences, well above the ablation threshold, femtosecond lasers can drill deep, high-quality holes in metals without any post-processing or special gas environment. It is shown that for high-quality drilling of metals, the following processes are important: (1) laser-induced optical breakdown of air containing metal vapor and small metal particles (debris) generated by multi-pulse femtosecond laser ablation, (2) transformation of laser pulses into light filaments, and (3) low-fluence finishing.
引用
收藏
页码：307 / 310
页数：4
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