Deep drilling of metals by femtosecond laser pulses

被引：168

作者：

Kamlage, G ^{[1
]}

Bauer, T ^{[1
]}

Ostendorf, A ^{[1
]}

Chichkov, BN ^{[1
]}

机构：

[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 02期

关键词：

D O I：

10.1007/s00339-003-2120-x

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Results of recent investigations on deep drilling of metals by femtosecond laser pulses are reported. At high laser fluences, well above the ablation threshold, femtosecond lasers can drill deep, high-quality holes in metals without any post-processing or special gas environment. It is shown that for high-quality drilling of metals, the following processes are important: (1) laser-induced optical breakdown of air containing metal vapor and small metal particles (debris) generated by multi-pulse femtosecond laser ablation, (2) transformation of laser pulses into light filaments, and (3) low-fluence finishing.

引用

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页码：307 / 310

页数：4

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