Micro-displacement Measurement with High Accuracy for Micro-motion Stage Based on Computer Microvision

被引：1
|
作者：
Fan, Y. B. [1 ]
Lu, Q. H. [1 ]
Zhang, X. M. [2 ]
机构：
[1] Foshan Univ, Dept Mechatron, Foshan 528000, Peoples R China
[2] South China Univ Technol, Sch Mech & Automot Engn, Guangzhou 510640, Peoples R China
来源：
MANUFACTURING AUTOMATION TECHNOLOGY DEVELOPMENT | 2011年 / 455卷
关键词：
Micro-displacement Measurement; Computer Microvision; High Accuracy;
D O I：
10.4028/www.scientific.net/KEM.455.76
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The micro-motion stages are critically important in modern manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates micro-motion measurement algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, an algorithm for micro-motion measurement is proposed. Finally, the micro-displacement of the micro-motion stage is measured using the integrated approach. The maximal bias of this proposed combined approach reached 12.5 nm. Experimental results show that this method can measure micro-displacement with nanometer accuracy.
引用
收藏
页码：76 / +
页数：2
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