Spectroscopic ellipsometric study of the optical properties of Ag2O film prepared by direct-current magnetron reactive sputtering

被引:0
|
作者
Gao Xiao-Yong [1 ]
Feng Hong-Liang [1 ]
Ma Jiao-Min [1 ]
Zhang Zeng-Yuan [1 ]
机构
[1] Zhengzhou Univ, Key Lab Mat Phys, Minist Educ, Sch Phys & Engn, Zhengzhou 450052, Peoples R China
基金
中国国家自然科学基金;
关键词
Ag2O film; spectroscopic ellipsometry; general oscillator model; single-oscillator model; SILVER-OXIDE FILMS; THIN-FILMS; LUMINESCENCE; TECHNOLOGY; CONSTANT; BEHAVIOR;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The Ag2O film, as-deposited by direct-current magnetron reactive sputtering at a substrate temperature of 150 degrees C, clearly shows a preferential orientation (111), and is capable of lowering the threshold value of the thermal decomposition temperature to about 200 degrees C, which is helpful to its application in optical and magneto-optical storage. This paper fits its optical constants in terms of a general oscillator model by using measured ellipsometric parameters. The fitted oscillator energy 2.487 eV is close to the optical direct interband transition energy value of the Ag2O film determined by Tauc equation; whereas, the fitted oscillator energy 4.249 eV is far from the fitted plasma oscillator energy 4.756 eV by single-oscillator energy. The photoluminescence spectrum centred at about 2.31 eV indicates a direct-energy gap photoluminescence mechanism of the Ag2O film.
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页数:6
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