共 50 条
- [22] POLYSILICON PASSIVATION OF SEMICONDUCTOR-DEVICES [J]. THIN SOLID FILMS, 1981, 75 (02) : 125 - 131
- [23] Low temperature polysilicon materials and devices [J]. FLAT PANEL DISPLAY MATERIALS II, 1997, 424 : 127 - 140
- [24] Polysilicon-on-Insulator Photonic Devices [J]. 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 516 - 517
- [25] SWITCHING CHARACTERISTICS OF POLYSILICON MISS DEVICES [J]. SOLID-STATE ELECTRONICS, 1984, 27 (11) : 937 - 944
- [27] Fracture toughness of polysilicon MEMS devices [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) : 274 - 280
- [28] A study of creep in polysilicon MEMS devices [J]. JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME, 2005, 127 (01): : 90 - 96