Design and Analysis of Two Dimensional X-Y Micropositioning Stage

This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution. The simulation computation results demonstrate that the stage could reach a motion range of 200 mu m by 200 mu m and has a first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype is being fabricated.