X-Y Micropositioning Piezostage Design with Large Workspace Density

被引：0
|
作者：
Cao R. [1 ]
Hao L. [1 ]
Gao J. [1 ]
机构：
[1] School of Mechanical Engineering & Automation, Northeastern University, Shenyang
来源：
Hao, Lina (haolina@me.neu.edu.cn) | 1600年 / Chinese Mechanical Engineering Society卷 / 28期
关键词：
Displacement amplifier; Flexible hinge; Microstage; Workspace density;
D O I：
10.3969/j.issn.1004-132X.2017.09.002
中图分类号：
学科分类号：
摘要：
Aiming at the problems of small microstage workspace density, a kind of 2-DOF symmetrical parallel microstage was put forward herein. First, the main deformation factors were analyzed in the displacement amplifier; second, the stiffnesses of circular flexible hinge, parallel plate flexible hinge and corner-filleted flexible hinge were calculated; third, the energy method and the displacement matrix were utilized to get the output force formula of parallelogram displacement amplifier, displacement formula of the stage movement; finally, the variables of microstage were optimized and the optimal results were verified through the simulations and experiments. Results show that the workspace and workspace density may reach to 143.7 μm×142.1 μm and 2.521 μm2/mm2 respectively, thus it may realize a higher workspace density. © 2017, China Mechanical Engineering Magazine Office. All right reserved.
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页码：1016 / 1020and1028
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