ACCURATE POSITIONING X-Y STAGE SERVO CHARACTERISTICS

被引：0
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作者：
IDO, S
TSUYUZAKI, H
机构：
来源：
BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING | 1981年 / 15卷 / 04期
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中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
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页码：257 / &
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