We report a resistive random-access memory (RRAM) using stacked GeO2 and PZT. Under unipolar mode operation, the Ni/GeO2/PZT/TaN RRAM shows a good DC cycling of 2x10(3) cycles, 85 degrees C retention, and large resistance window about 120x, which is better than that shown by the single-layer Ni/PZT/TaN RRAM without the covalent-bond-dielectric GeO2.
机构:
Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, 3 BeiTuCheng West Rd, Beijing 100029, Peoples R ChinaPohang Univ Sci & Technol POSTECH, Dept Mat Sci & Engn, Ctr Single Atom Based Semicond Device, Pohang 790784, South Korea
Liu, Qi
Hwang, Hyunsang
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Pohang Univ Sci & Technol POSTECH, Dept Mat Sci & Engn, Ctr Single Atom Based Semicond Device, Pohang 790784, South KoreaPohang Univ Sci & Technol POSTECH, Dept Mat Sci & Engn, Ctr Single Atom Based Semicond Device, Pohang 790784, South Korea
机构:
Korea Univ, Dept Nano Semicond Engn, Seoul 137701, South KoreaKorea Univ, Dept Nano Semicond Engn, Seoul 137701, South Korea
Chung, Isaac
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Cho, Kyoungah
Yun, Junggwon
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Korea Univ, Dept Elect Engn, Seoul 137701, South KoreaKorea Univ, Dept Nano Semicond Engn, Seoul 137701, South Korea
Yun, Junggwon
Kim, Sangsig
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Korea Univ, Dept Nano Semicond Engn, Seoul 137701, South Korea
Korea Univ, Dept Elect Engn, Seoul 137701, South KoreaKorea Univ, Dept Nano Semicond Engn, Seoul 137701, South Korea