Integrated array of SAW sensors for gas analysis

被引：0
|
作者：
Anisimkin, VI [1 ]
Fedosov, VI [1 ]
Krystal, RG [1 ]
Medved, AV [1 ]
Zemlyakov, VE [1 ]
Verona, E [1 ]
机构：
[1] Russian Acad Sci, Inst Radioengn & Elect, Moscow, Russia
来源：
1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2 | 1998年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A new approach, based on the properties of SAW devices, is used to integrate an array of gas sensors into a single substrate, using a single chemical membrane. The different response of each individual device to the same set of gases is provided by different acoustic propagation conditions, only. Three four-sensor prototypes have been implemented on ST-cut quartz substrates, using different Pd films as membrane. Their response upon exposure to concentrations of H-2, N2O and CO in N-2 and to water humidity have been tested. A strong dependence of the response versus the acoustic propagation direction has been demonstrated for all the prototypes analyzed.
引用
收藏
页码：529 / 533
页数：5
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